Exhaust Filter Kits
Pump Model # Busch Part # Airtech Part #
R0012/0021 993.120.02 BUFK-1061
R0025/0040 993.134.02 BUFK-1047
R0025C/0040C 0993.900.245 BUFK-1172
R0063/0100 993.194.02 BUFK-1047-2
R0063C/0100C 993.902.118 BUFK-1047-2
R0160 0993.900.556 BUFK-1048-4
R0250B 993.256.02 BUFK-1048-4
R0250C 993.900.557 BUFK-1048-3
R0400/0630 993.316.02 BUFK-1049-8
R1000/1600 993.370.02 BUFK-1049-16
Pump Model # Becker Part # Airtech Part #
U3.10-3.16 065401 BEFK-1031
U3.25/3.40 065401 BEFK-1031
U4.70/4.100 965409 BEFK-1093
U4.165/4.190/4.250 965412 (x2) BEFK-1092-2
U4.400 965410 (x2) BEFK-1115-2
U4.630 965411 (x2) BEFK-1116-2
U2.70/2.1000 965402 BEFK-1020
U2.165 965403 BEFK-1030
U2.190/2.250 965403 (x2) BEFK-1030-2
Pump Model # Rietschle Part # Airtech Part #
VCA/E-40 465 WRFK-40
VCA/E-60 466 WRFK-60
VCAH/EH-100 467 WRFK-100
VCAH/EH160 468 WRFK-160
VCAH/EH-250 469 WRFK-250
VC-200 468 WRFK-200
VC-300 469 WRFK-300
VC-400 470 WRFK-400
VC-500/700 471 WRFK-500/700
VC-900 472 WRFK-900
VC-1100/1300 473 WRFK-1100/1300
Pump Model # Airtech Part #  
L 12/21 LFK-10616  
L/H 25/40 LFK-1047  
L/H 63/100 LFK-1047-2  
L/H 160 LFK-1030  
L/H 230 LFK-1030-2  
L/H 250 LFK-7000  
L/H 160C/250C LFK-1048-4  
L/H 400 LFK-7000-2  
L/H 630 LFK-7001-2  
L/H 400C/630C LFK-1049-8  

Inlet Filters
Pump Model # Busch Part # Airtech Part #   Element #
R0025-0063 945.006.01 ATF-125-1112 1 1/4" ATC-1112
R0100 945.007.01 ATF-125-1337 1 1/4" ATC-1337
R0160,0250 945.008.01 ATF-200-15124 2" ATC-15124
R0400,0630 945.010.01 ATF-300-26240 3" ATC-26240/ATC-2035
Pump Model #   Airtech Part #   Element #
L12   ATF-075-75 3/4" ATC-75
L/H 25/40   ATF-125-1112 1 1/4" ATC-1112
L/H 63/100   ATF-125-1337 1 1/4" ATC-1337
L/H 160/230/250/250C   ATF-200-15124 2" ATC-15124
L/H 400/400C/630/630C   ATF-300-21138 3" ATC-21138
L/H 400/400C/630/630C   ATF-400-21138 4" ATC-21138

Gasket Kits
Pump Model # Busch Part # Airtech Part #
BUGK-R0025/0040 990.061.02 BUGK-25/40
R0025C/0040C 990.900.248 BUGK-25/40C
R0063/0100 990.081.02 BUGK-63/100
R0063C/0100C 990.902.115 BUGK-63/100C
R0160/0250 990.111.02 BUGK-160/250
R0250C 990.900.559 BUGK-250C
R0400/0630 990.140.02 BUGK-400/630
Pump Model # Becker Part # Airtech Part #
U3.10/3.16 549000235 BEGK-3.10/3.16
U3.25/3.40 549000238 BEGK-3.25/3.40
U4.70/4.100 549000261 BEGK-4.70/4.100
U4.165/4.190/4.250 549000264 BEGK-4.165/4.190/4.250
U4.400/4.630 549000267 BEGK-4.400/4.630
U2.70/2.100 549000107 BEGK-2.70/2.100
U2.165/2.190/2.250 549000129 BEGK-2.165/2.190/2.250
Pump Model #   Airtech Part #
L 12/21   LGK-12/21
L/H 25/40   LGK-25/40
L/H 63/100   LGK-63/100
L/H 160/230   LGK-160/230
L/H 250   LGK-250
L/H 400/630   LGK-400/630
L/H 160C   LGK-160C
L/H 250C   LGK-250C
L/H 400C/630C   LGK-400C/630C

Vanes
Pump Model # Busch Part # Airtech Part #
R0021 710.301.00 (x3) BUV-12/21
R0025 722.270.00 (x3) BUV-25
R0040 722.300.00 (x3) BUV-40
R0063 722.330.00 (x3) BUV-63
R0100 722.360.00 (x3) BUV-100
R0160* 722.452.00 (x3) BUV-160
R0250* 722.516.729(x3) BUV-250
R0400* 722.454.00 (x3) BUV-400
R0630* 722.455.00 (x3) BUV-630
* KEVLAR    
Pump Model # Becker Part # Airtech Part #
U2.70/4.70 900511 (x3) BEV-70
U2.100/4.100 900512 (x3) BEV-100
U2.165/4.165 900505 (x3) BEV-165
U2.190/4.190 900506 (x3) BEV-190
U2.250/4.250 900507 (x3) BEV-250
U4.400 900580 (x3) BEV-400
U4.630 900581 (x3) BEV-630

Oil Filters
Pump Model # Busch Part # Airtech Part #
R0025-R0100 531.002.00 ATOF-51348
R0160-R0250 531.001.00 ATOF-51452
R0400-R1600 531.005.00 ATOF-51820

Overhaul Kits
Pump Model # Busch Part # Airtech Part #
R0025 993.138.02 BURK-25
R0025C 993.900.246 BURK-25C
R0040 993.168.02 BURK-40
R0040C 993.900.247 BURK-40C
R0063 993.198.02 BURK-63
R0063C 993.902.116 BURK-63C
R0100 993.228.02 BURK-100
R0100C 993.902.117 BURK-100C
R0160 993.045.01 BURK-160
R0250 993.046.01 BURK-250
R0250C 993.900.558 BURK-250C
R0400 993.047.01 BURK-400
R0630 993.048.01 BURK-630
Pump Model # Becker Part # Airtech Part #
U4.70 33801200 BERK-4.70
U4.100 33801400 BERK-4.100
U4.165 33801600 BERK-4.165
U4.190 33801800 BERK-4.190
U4.250 33802000 BERK-4.250
U4.400 33805000 BERK-4.400
U4.630 33805200 BERK-4.630
U2.70 33801100 BERK-2.70
U2.100 33801300 BERK-2.100
U2.165 33801500 BERK-2.165
U2.190 33801700 BERK-2.190
U2.250 33801900 BERK-2.250
Pump Model # Airtech Part #  
L 12/21 LRK-12/21  
L/H 25 LRK-25  
L/H 40 LRK-40  
L/H 63 LRK-63  
L/H 100 LRK-100  
L/H 160 LRK-160  
L/H 230 LRK-230  
L/H 250 LRK-250  
L/H 400 LRK-400  
L/H 630 LRK-630  
L/H 160C LRK-160C  
L/H 250C LRK-250C  
L/H 400C LRK-400C  
L/H 630C LRK-630C  

Vacuum Pump Oil
Type: Busch Part # Airtech Part # Quantity
R530 (Hydrocarbon) 831.033.01 ATO-1000-01 1 Qt.
  831.051.01 ATO-1000-02 4 Qt./1 ctn.
  831.035.01 ATO-1000-03 12 Qt./1 ctn.
  831.014.01 ATO-1000-04 5 gal. Pail
  831.029.01 ATO-1000-05 55 gal. drum
R590 (Semi-Synthetic) 831.900.181 ATO-2000-01 1 Qt.
  831.900.256 ATO-2000-02 4 Qt./1 ctn.
  831.900.257 ATO-2000-03 12 Qt./1 ctn.
  831.040.01 ATO-2000-04 5 gal. Pail
  831.041.01 ATO-2000-05 55 gal. drum